Manufacturing and sales of quartz glass. We can process glass as you wish. 日本語サイト

gaiyou seihin seihin-rikagaku セラミック製品 siryou  
 
 

・Silicon nitride(Si3N4)

・Aluminum nitride(ALN)
Feature

・ High thermal conductivity, high thermal reflectance, and high soaking.
・ High thermal shock resistance and can endure rapid heating and quenching.
・ Low thermal expansion that matched with Silicon. It prevents transformation of the wafer by temperature change and
reduce particle generation due to exfoliation of deposited film.
・  Superior corrosion proof against fluorine-containing gas


Application
・Semiconductor equipment (CDV,etching etc)
   Susceptor, electrostatic check, heater soaking board
   Vacuum check, heater
・ Dummy wafer
・ Target

・ Parts for the compound semiconductor equipment


・Sic etc
We are available to process parts for semiconductor equipment.

Belljar by Armina

 

 
We can provide any kinds of quartz glass.

Send email to us

TEL:03-3943-6571
 

10th September 2015.Renewal
Copyright(c)2015 Kobayashi-SpecialGlass Co.,Ltd.All Rights Reserved.